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JXA-8530FPlus HyperProbe Electron Probe Microanalyzer
The JEOL 8530F "hyperprobe" has five wavelength-dispersive spectrometers all with large area crystals used for high-precision analysis of elements ranging down to carbon. The field emission source produces nanometer-scale imaging resolution and allows analysis of some materials in sub-micron areas. It is outfitted with an integrated silicon drift energy dispersive spectrometer and panchromatic cathodoluminescence detector. In addition to JEOL control software, the instrument can be run using Probe for EPMA. Typical samples are flat, highly polished thin sections and polished sections of meteorites, rocks, minerals and experimental run products.